A silicon nitride plate and suspension with the dimensions given in Problem 11.1 has an aluminum resistor deposited on it. The resistor has a meander pattern.

The aluminum thickness is 0.1 µm and the width is 1 µm.The total meander length is 1 mm. Contacts to this resistor are made by running the aluminum lines down two of the supports.

How does the presence of the aluminum affect the thermal capacity, the thermal resistance and the thermal times constant of the structure as calculated in Problem 11.2?

How much current will be needed in the aluminum resistor to raise the temperature of the plate by 50°C above the substrate temperature? Is self-heating of the aluminum important in this application?


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